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      A novel single chip thin film metal oxide array

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      Sensors and Actuators B: Chemical

      Elsevier BV

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          Micromachined metal oxide gas sensors: opportunities to improve sensor performance

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            Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing

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              Microhotplate platforms for chemical sensor research

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                Author and article information

                Journal
                Sensors and Actuators B: Chemical
                Sensors and Actuators B: Chemical
                Elsevier BV
                09254005
                August 2003
                August 2003
                : 93
                : 1-3
                : 350-355
                Article
                10.1016/S0925-4005(03)00218-1
                © 2003

                http://www.elsevier.com/tdm/userlicense/1.0/

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