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2,029
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A novel single chip thin film metal oxide array
Author(s):
J. Wöllenstein
,
J.A. Plaza
,
C. Cané
,
Y. Min
,
H. Böttner
,
H.L. Tuller
Publication date
Created:
August 2003
Publication date
(Print):
August 2003
Journal:
Sensors and Actuators B: Chemical
Publisher:
Elsevier BV
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Most cited references
11
Record
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Micromachined metal oxide gas sensors: opportunities to improve sensor performance
Nicolae Barsan
,
Udo Weimar
,
Isolde Simon
…
(2001)
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Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
M. Gaitan
,
R.E. Cavicchi
,
S. Semancik
…
(1993)
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Microhotplate platforms for chemical sensor research
D.L. DeVoe
,
S. Semancik
,
R.E. Cavicchi
…
(2001)
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Author and article information
Journal
Title:
Sensors and Actuators B: Chemical
Abbreviated Title:
Sensors and Actuators B: Chemical
Publisher:
Elsevier BV
ISSN (Print):
09254005
Publication date Created:
August 2003
Publication date (Print):
August 2003
Volume
: 93
Issue
: 1-3
Pages
: 350-355
Article
DOI:
10.1016/S0925-4005(03)00218-1
SO-VID:
cdf9b509-5c10-4cb5-84e1-f1908a5e6ca6
Copyright ©
© 2003
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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