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      Electrostatic pull-in instability in MEMS/NEMS: A review

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      Sensors and Actuators A: Physical

      Elsevier BV

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          The resonant gate transistor

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            M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

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              A review of microvalves

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                Author and article information

                Journal
                Sensors and Actuators A: Physical
                Sensors and Actuators A: Physical
                Elsevier BV
                09244247
                August 2014
                August 2014
                : 214
                :
                : 187-218
                Article
                10.1016/j.sna.2014.04.025
                © 2014

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