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Electrostatic pull-in instability in MEMS/NEMS: A review

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Sensors and Actuators A: Physical

Elsevier BV

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        M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

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          A review of microvalves

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            Author and article information

            Journal
            Sensors and Actuators A: Physical
            Sensors and Actuators A: Physical
            Elsevier BV
            09244247
            August 2014
            August 2014
            : 214
            :
            : 187-218
            10.1016/j.sna.2014.04.025
            © 2014

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