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Post patterning meso porosity creation: a potential solution for pore sealing
proceedings-article
R. Caluwaerts ,
M. Van Hove ,
G. Beyer ,
R.J.O.M. Hoofman ,
H. Struyf ,
G.J.A.M. Verheyden ,
J. Waeterloos ,
Z. Tokei ,
F. Iacopi ,
L. Carbonell ,
Q.T. Le ,
A. Das ,
I. Vos ,
S. Demuynck ,
K. Maex
2003
IEEE International Interconnect Technology Conference (IITC-03)
2-4 June 2003
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