Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
October
01 2013
Publication date
(Electronic):
October
01 2013
Volume: 22
Issue: 5
Page: 055022
Article
DOI: 10.1088/0963-0252/22/5/055022
SO-VID: d18f496f-918b-497a-a4d7-9a1059b44230
Copyright © ©
2013