Title:
Microsystem Technologies
Abbreviated Title:
Microsyst Technol
Publisher:
Springer Science and Business Media LLC
ISSN
(Print):
0946-7076
ISSN
(Electronic):
1432-1858
Publication date Created:
February
2020
Publication date
(Electronic):
May
28 2019
Publication date
(Print):
February
2020
Volume: 26
Issue: 2
Pages: 517-530
Article
DOI: 10.1007/s00542-019-04498-w
SO-VID: d2696762-0b71-4ce4-9f00-268e6fd01505
Copyright © ©
2020