Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2000
Publication date
(Print):
2000
Volume: 18
Issue: 4
Page: 2242
Article
DOI: 10.1116/1.1303741
SO-VID: d53da9bb-cd73-46f5-992c-6bc2cd6d8fc1
Copyright © ©
2000