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4,003
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Characterization of composite piezoelectric thick film for MEMS application
Author(s):
Zhihong Wang
,
Weiguang Zhu
,
Chen Chao
,
Changlei Zhao
,
Xiaofeng Chen
Publication date:
2005
Journal:
Surface and Coatings Technology
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Silicon thin film solar cells
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DOI::
10.1016/j.surfcoat.2004.10.104
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