Title:
Journal of Vacuum Science and Technology
Abbreviated Title:
Journal of Vacuum Science and Technology
Publisher:
American Vacuum Society
ISSN
(Print):
0022-5355
Publication date Created:
January
1976
Publication date
(Print):
January
1976
Volume: 13
Issue: 1
Pages: 157-164
Article
DOI: 10.1116/1.568813
SO-VID: d999b9bf-1042-46f9-8f24-6e2a32f18106
Copyright © ©
1976