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      Scanning electron microscopy observations of misfit dislocations in epitaxial In 0.25Ga 0.75As on GaAs(001)

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      Journal of Materials Research
      Springer Science and Business Media LLC

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          Abstract

          Dislocations in the misfit epitaxial film system In 0.25Ga 0.75As on GaAs(001) were imaged using a modified electron channeling contrast technique in a LaB 6 SEM. We obtained images at an incident beam energy of 30 keV, a beam divergence of less than 1 mrad and a specimen tilt of 70° in conjunction with a movable scintillator detector mounted at a takeoff angle of approximately 3° to 5°. We achieved a spatial resolution of approximately 80 to 100 nm with this technique. Such resolution allowed rapid imaging of clusters consisting of only a few closely spaced dislocations in a 55 nm thick film. At such small film thicknesses, we did not require accurate knowledge of the incident beam direction in order to obtain sufficiently strong channeling contrast for qualitative characterization. The observed defect arrangements included features that we believe represent clustered threading segments.

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          Some comments on the interpretation of the ‘kikuchi-like reflection patterns’ observed by scanning electron microscopy

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            A dynamical theory for the contrast of perfect and imperfect crystals in the scanning electron microscope using backscattered electrons

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              Electron–channelling imaging in scanning electron microscopy

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                Author and article information

                Journal
                Journal of Materials Research
                J. Mater. Res.
                Springer Science and Business Media LLC
                0884-2914
                2044-5326
                March 1996
                January 31 2011
                March 1996
                : 11
                : 3
                : 552-554
                Article
                10.1557/JMR.1996.0067
                dddd0a72-be06-4048-b633-39ac292bb0e2
                © 1996

                https://www.cambridge.org/core/terms

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