A Direct-solution Fuzzy Collaborative Intelligence Approach for Yield Forecasting in Semiconductor Manufacturing

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Journal

Title: Procedia Manufacturing

Abbreviated Title: Procedia Manufacturing

Publisher: Elsevier BV

ISSN (Print): 23519789

Publication date Created: 2018

Publication date (Print): 2018

Volume: 17

Pages: 110-117

Article

DOI: 10.1016/j.promfg.2018.10.021

SO-VID: e15a1a4d-b1cf-4ff7-869c-f1dc71099411

License:

https://www.elsevier.com/tdm/userlicense/1.0/

http://creativecommons.org/licenses/by-nc-nd/4.0/

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