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      Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017

      Author(s): 1
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      Journal: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
      Publisher: American Vacuum Society

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          THE ADSORPTION OF GASES ON PLANE SURFACES OF GLASS, MICA AND PLATINUM.

          Irving Langmuir (1918)
          Article 0 comments Cited 2863 times – based on 0 reviews     Review now
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            A Monte Carlo computer program for the transport of energetic ions in amorphous targets

            J.P. Biersack, L.G. Haggmark (1980)
            Article 0 comments Cited 707 times – based on 0 reviews     Review now
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              The Tension of Metallic Films Deposited by Electrolysis

              G. G. Stoney (1909)
              Article 0 comments Cited 615 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
                Abbreviated Title: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
                Publisher: American Vacuum Society
                ISSN (Print): 0734-2101
                ISSN (Electronic): 1520-8559
                Publication date Created: September 2017
                Publication date (Print): September 2017
                Volume: 35
                Issue: 5
                Page: 05C204
                Affiliations
                [1 ]D. B. Willett Professor of Materials Science and Physics, University of Illinois, Urbana, Illinois, 61801; Tage Erlander Professor of Physics, Linköping University, Linköping, Sweden, 58183, Sweden; and University Professor of Materials Science, National Taiwan University Science and Technology, Taipei City, 106, Taiwan
                Article
                DOI: 10.1116/1.4998940
                SO-VID: e1f6abd9-d772-4c3e-9394-afb3938e8f04
                Copyright © © 2017
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