2
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: not found
      • Article: not found

      A production process of silicon sensor elements for a fibre-optic pressure sensor

      , , ,
      Sensors and Actuators A: Physical
      Elsevier BV

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Author and article information

          Journal
          Sensors and Actuators A: Physical
          Sensors and Actuators A: Physical
          Elsevier BV
          09244247
          September 1997
          September 1997
          : 63
          : 1
          : 69-74
          Article
          10.1016/S0924-4247(97)80430-X
          e22a1e9e-1412-4154-8bb9-26f34b9ec3b2
          © 1997

          http://www.elsevier.com/tdm/userlicense/1.0/

          History

          Comments

          Comment on this article