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A production process of silicon sensor elements for a fibre-optic pressure sensor
Author(s):
Carola Strandman
,
Leif Smith
,
Lars Tenerz
,
Bertil Hök
Publication date
Created:
September 1997
Publication date
(Print):
September 1997
Journal:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
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Trace Elements and Electrolytes
Author and article information
Journal
Title:
Sensors and Actuators A: Physical
Abbreviated Title:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
ISSN (Print):
09244247
Publication date Created:
September 1997
Publication date (Print):
September 1997
Volume
: 63
Issue
: 1
Pages
: 69-74
Article
DOI:
10.1016/S0924-4247(97)80430-X
SO-VID:
e22a1e9e-1412-4154-8bb9-26f34b9ec3b2
Copyright ©
© 1997
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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