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      A triangular electrostatic comb array for micromechanical resonant frequency tuning

      Author(s): ,
      Publication date Created:
      Publication date (Print):
      Journal: Sensors and Actuators A: Physical
      Publisher: Elsevier BV

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          Laterally Driven Polysilicon Resonant Microstructures

          William Tang, Tu-Cuong Nguyen, Roger T Howe (1989)
          Article 0 comments Cited 154 times – based on 0 reviews     Review now
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            Electrostatic Comb Drive Levitation And Control Method

            R.T. Howe, M.G. Lim, W.C. Tang (1992)
            Article 0 comments Cited 44 times – based on 0 reviews     Review now
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              Resonator sensors-a review

              R M Langdon (1985)
              Article 0 comments Cited 29 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Sensors and Actuators A: Physical
                Abbreviated Title: Sensors and Actuators A: Physical
                Publisher: Elsevier BV
                ISSN (Print): 09244247
                Publication date Created: October 1998
                Publication date (Print): October 1998
                Volume: 70
                Issue: 1-2
                Pages: 112-117
                Article
                DOI: 10.1016/S0924-4247(98)00122-8
                SO-VID: e3c9553e-6721-494c-af65-3e123704be73
                Copyright © © 1998
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                http://www.elsevier.com/tdm/userlicense/1.0/

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