Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2000
Publication date
(Print):
2000
Volume: 18
Issue: 3
Page: 1785
Article
DOI: 10.1116/1.591472
SO-VID: e4bd759b-18c0-4959-8fe0-55920d2a5583
Copyright statement: ©
2000