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      Effects of process parameters on μc - Si 1 − XGe X:H solar cells performance and material properties

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          Abstract

          On our way to develop a very thin and highly efficient triple-junction thin-film solar cell in a-Si:H/ μ c-Si:H/ μ c-SiGe:H configuration and μ c-SiGe:H single cell samples were prepared and characterized using an industrial relevant 13.56 MHz 0.5 nm/s process on an industrial like 30 × 30 cm 2 PECVD tool. To attain a better understanding of the μ c-SiGe:H absorber we varied process pressure, germane flow, dilution and silane flow while looking at the electrical and material properties. By realizing a total absorber thickness less than 2 μ m for high efficiency cell concepts in triple technology, our intention is to develop an industrial relevant process with attractive fabrication times by benefiting from the enhanced absorption of μ c-SiGe:H compared to μ c-Si:H.

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          Most cited references9

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          Solar cell efficiency tables (version 41)

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            Raman spectra ofc-Si1−xGexalloys

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              Remarkable progress in thin-film silicon solar cells using high-efficiency triple-junction technology

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                Author and article information

                Journal
                epjpv
                EPJ Photovoltaics
                an Open Access Journal in Photovoltaics
                EPJ Photovolt.
                EDP Sciences
                2105-0716
                23 February 2015
                2015
                23 February 2015
                23 February 2015
                : 6
                : ( publisher-idID: epjpv/2015/01 )
                : 65301
                Affiliations
                NEXT ENERGY, EWE Research Centre for Energy Technology at the University of Oldenburg, , Carl-von-Ossietzky-Str. 15, 26129 Oldenburg, Germany,
                Author notes
                Article
                pv140019
                10.1051/epjpv/2015002
                e5a9f47a-56e7-43a3-9376-0fb3225db1f8
                © Reininghaus et al., published by EDP Sciences, 2015

                This is an Open Access article distributed under the terms of the Creative Commons Attribution License ( http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

                History
                : 16 October 2014
                : 21 January 2015
                Page count
                Figures: 6, Equations: 1, References: 12, Pages: 5
                Categories
                Topical issue: Photovoltaic Technical Conference (PVTC 2014)
                Custom metadata
                EPJ Photovoltaics 6, 65301 (2015)
                2015
                2015
                2015

                Sustainable & Green chemistry,Materials technology,Semiconductors,Materials for energy,Technical & Applied physics,Renewable energy

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