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      Reduction of Dark Current in CMOS Image Sensor Pixels Using Hydrocarbon-Molecular-Ion-Implanted Double Epitaxial Si Wafers

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          Abstract

          The impact of hydrocarbon-molecular (C 3H 6)-ion implantation in an epitaxial layer, which has low oxygen concentration, on the dark characteristics of complementary metal-oxide-semiconductor (CMOS) image sensor pixels was investigated by dark current spectroscopy. It was demonstrated that white spot defects of CMOS image sensor pixels when using a double epitaxial silicon wafer with C 3H 6-ion implanted in the first epitaxial layer were 40% lower than that when using an epitaxial silicon wafer with C 3H 6-ion implanted in the Czochralski-grown silicon substrate. This considerable reduction in white spot defects on the C 3H 6-ion-implanted double epitaxial silicon wafer may be due to the high gettering capability for metallic contamination during the device fabrication process and the suppression effects of oxygen diffusion into the device active layer. In addition, the defects with low internal oxygen concentration were observed in the C 3H 6-ion-implanted region of the double epitaxial silicon wafer after the device fabrication process. We found that the formation of defects with low internal oxygen concentration is a phenomenon specific to the C 3H 6-ion-implanted double epitaxial wafer. This finding suggests that the oxygen concentration in the defects being low is a factor in the high gettering capability for metallic impurities, and those defects are considered to directly contribute to the reduction in white spot defects in CMOS image sensor pixels.

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          Most cited references 53

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          CMOS image sensors: electronic camera-on-a-chip

           E.R. Fossum (1997)
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            Electric field effect on the thermal emission of traps in semiconductor junctions

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                Author and article information

                Journal
                Sensors (Basel)
                Sensors (Basel)
                sensors
                Sensors (Basel, Switzerland)
                MDPI
                1424-8220
                19 November 2020
                November 2020
                : 20
                : 22
                Affiliations
                SUMCO Corporation, 1-52 Kubara, Yamashiro-cho, Imari-shi, Saga 849-4256, Japan; tkadono@ 123456sumcosi.com (T.K.); rokuyama@ 123456sumcosi.com (R.O.); rhirose@ 123456sumcosi.com (R.H.); kkobayas@ 123456sumcosi.com (K.K.); asuzuki1@ 123456sumcosi.com (A.S.); ykoga4@ 123456sumcosi.com (Y.K.); k-kurita@ 123456sumcosi.com (K.K.)
                Author notes
                [* ]Correspondence: aonaka@ 123456sumcosi.com ; Tel.: +81-955-20-2298
                Article
                sensors-20-06620
                10.3390/s20226620
                7699194
                33228009
                e78d884e-21a7-47e1-97b3-15fc5564df5e
                © 2020 by the authors.

                Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license ( http://creativecommons.org/licenses/by/4.0/).

                Categories
                Article

                Biomedical engineering

                cmos image sensor, gettering, white spot defects, oxygen

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