Fabrication of novel three-dimensional microstructures by the anisotropic etching of

Bassous, E.

doi:10.1109/T-ED.1978.19249

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Fabrication of novel three-dimensional microstructures by the anisotropic etching of

Author(s): E. Bassous

Publication date (Print): October 1978

Journal: IEEE Transactions on Electron Devices

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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Title: IEEE Transactions on Electron Devices

Abbreviated Title: IEEE Trans. Electron Devices

Publisher: Institute of Electrical and Electronics Engineers (IEEE)

ISSN (Print): 0018-9383

ISSN (Electronic): 1557-9646

Publication date Created: October 1978

Publication date (Print): October 1978

Volume: 25

Issue: 10

Pages: 1178-1185

Article

DOI: 10.1109/T-ED.1978.19249

SO-VID: e8921ff8-7c5e-40e6-85ad-b87baf003ed2

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Fabrication of novel three-dimensional microstructures by the anisotropic etching of

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