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      Fabrication of novel three-dimensional microstructures by the anisotropic etching of

      IEEE Transactions on Electron Devices

      Institute of Electrical and Electronics Engineers (IEEE)

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          Journal
          IEEE Transactions on Electron Devices
          IEEE Trans. Electron Devices
          Institute of Electrical and Electronics Engineers (IEEE)
          0018-9383
          1557-9646
          October 1978
          October 1978
          : 25
          : 10
          : 1178-1185
          Article
          10.1109/T-ED.1978.19249
          e8921ff8-7c5e-40e6-85ad-b87baf003ed2
          © 1978
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