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X-ray microdiffraction: Local stress distributions in polycrystalline and epitaxial thin films
Author(s):
MA Phillips
,
M.A. PHILLIPS
,
R Spolenak
,
N. Tamura
,
W.L. BROWN
,
A.A. MacDowell
,
R.S. Celestre
,
H.A. Padmore
,
B.W. Batterman
,
E. Arzt
,
J.R. Patel
,
M.A. Phillips
,
N TAMURA
,
W.L. Brown
,
A.A Macdowell
,
N. Tamura
Publication date:
2004
Journal:
Microelec Eng
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DOI::
10.1016/j.mee.2003.12.053
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