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      Off-Line Quality Control in Integrated Circuit Fabrication Using Experimental Design

      , , ,
      Bell System Technical Journal
      Wiley-Blackwell

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          Author and article information

          Journal
          Bell System Technical Journal
          Wiley-Blackwell
          00058580
          May 06 1983
          May 06 1983
          : 62
          : 5
          : 1273-1309
          Article
          10.1002/j.1538-7305.1983.tb02298.x
          e96cbe3d-ba27-49fd-908d-d5e5dc37c5fd
          © 1983
          History

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