For Publishers
DiscoveryMetadataPeer reviewHostingPublishing
For Researchers
JoinPublishReviewCollect
Register
Blog
About
Search
Advanced search
My ScienceOpen
Search
For Publishers
For Researchers
Blog
About
8
views
0
references
 Top references
cited by
1
    
0 reviews
 Review
0
comments
 Comment
0
recommends
+1 Recommend
0 collections
    0
    shares
      3,489
      similar
       All similar
      • Record: found
      • Abstract: not found
      • Article: not found

      Imaging conditions for electron‐beam micromachining

      Author(s):
      Publication date Created:
      Publication date (Print):
      Journal: Journal of Vacuum Science and Technology
      Publisher: American Vacuum Society

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Author and article information

          Journal
          Title: Journal of Vacuum Science and Technology
          Abbreviated Title: Journal of Vacuum Science and Technology
          Publisher: American Vacuum Society
          ISSN (Print): 0022-5355
          Publication date Created: May 1978
          Publication date (Print): May 1978
          Volume: 15
          Issue: 3
          Pages: 1053-1055
          Article
          DOI: 10.1116/1.569734
          SO-VID: e9c2b8b4-c480-4875-b911-e013d0306ab2
          Copyright © © 1978
          History

          ScienceOpen disciplines: Biochemistry,Animal science & Zoology
          Data availability:
          ScienceOpen disciplines: Biochemistry, Animal science & Zoology

          Comments

          Comment on this article