Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date
(Print):
May
1991
Volume: 9
Issue: 3
Page: 1559
Article
DOI: 10.1116/1.585423
SO-VID: ed6d8497-08b3-42b2-9702-0a5fead1d2f6