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          Journal
          JVTBD9
          Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
          J. Vac. Sci. Technol. B
          American Vacuum Society
          0734211X
          May 1991
          : 9
          : 3
          : 1559
          Article
          10.1116/1.585423
          ed6d8497-08b3-42b2-9702-0a5fead1d2f6
          History

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