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      Optical interference lithography using azobenzene-functionalized polymers for micro- and nanopatterning of silicon.

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      Publication date:
      Journal: Advanced Materials (Deerfield Beach, Fla.)
      Keywords: Azo Compounds, chemistry, Microtechnology, methods, Nanotechnology, Optical Processes, Polymers, Printing, Silicon

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          PubMed ID:: 21823180
          DOI:: 10.1002/adma.201101888

          ScienceOpen disciplines: Chemistry
          Keywords: Azo Compounds,chemistry,Microtechnology,methods,Nanotechnology,Optical Processes,Polymers,Printing,Silicon
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          ScienceOpen disciplines: Chemistry
          Keywords: Azo Compounds, chemistry, Microtechnology, methods, Nanotechnology, Optical Processes, Polymers, Printing, Silicon

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