Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2002
Publication date
(Print):
2002
Volume: 20
Issue: 6
Page: 2535
Article
DOI: 10.1116/1.1519863
SO-VID: eeb02ea8-90c4-472f-8368-17cc4f6af853
Copyright © ©
2002