High resolution studies of crystalline damage induced by lapping and single-point diamond machining of Si(100)

Ahern, B. S.; Rothschild, M; Kunz, R R; Clark, H. R.; Nitishin, P. M.

doi:10.1557/JMR.1996.0157

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High resolution studies of crystalline damage induced by lapping and single-point diamond machining of Si(100)

Author(s): R. R. Kunz , H. R. Clark , P. M. Nitishin , M. Rothschild , B. S. Ahern

Publication date (Electronic): January 31 2011

Journal: Journal of Materials Research

Publisher: Cambridge University Press (CUP)

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Journal ID (publisher-id): applab

Title: Journal of Materials Research

Abbreviated Title: J. Mater. Res.

Publisher: Cambridge University Press (CUP)

ISSN (Print): 0884-2914

ISSN (Electronic): 2044-5326

Publication date Created: May 1996

Publication date (Electronic): January 31 2011

Publication date (Print): May 1996

Volume: 11

Issue: 05

Pages: 1228-1237

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DOI: 10.1557/JMR.1996.0157

SO-VID: f29d0d82-33bd-4b2f-8df9-ec31f02dd687

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High resolution studies of crystalline damage induced by lapping and single-point diamond machining of Si(100)

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