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Oxidation Resistance of CrAlN Films with Different Microstructures Prepared by Pulsed DC Balanced Magnetron Sputtering System
Author(s):
S. Khamseh
,
M. NOSE
,
T. KAWABATA
,
K. MATSUDA
,
S. IKENO
Publication date:
2010
Journal:
Mater. Trans.
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JAMA Network: Coronavirus
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DOI::
10.2320/matertrans.MC200912
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