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      Numerical modeling and analysis of plasmonic flying head for rotary near-field lithography technology

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          Abstract

          Rotary near-field lithography (RNFL) technology provides a route to overcome the diffraction limit with a high throughput and low cost for nanomanufacturing. Utilizing the advantage of the passive flying of a plasmonic head, RNFL can achieve a 10 m/s processing speed with a perfect near-field condition at dozens of nanometers. The flying performance of the plasmonic flying head (PFH) is the pivotal issue in the system. The linewidth has a strong correlation with the near-field gap, and the manufacturing uniformity is directly influenced by the dynamic performance. A more serious issue is that the unexpected contact between the PFH and substrate will result in system failure. Therefore, it is important to model and analyze the flying process of the PFH at the system level. In this study, a novel full-coupled suspension-PFH-air-substrate (SPAS) model that integrates a six-degree of freedom suspension-PFH dynamics, PFH-air-substrate air bearing lubrication, and substrate vibration, is established. The pressure distribution of the air bearing is governed by the molecular gas lubrication equation that is solved by the finite element method (FEM) with a local pressure gradient based adaptive mesh refinement algorithm using the COMSOL Multiphysics software. Based on this model, three designs of the air bearing surface are chosen to study the static, dynamic, and load/unload performance to verify whether it satisfies the design requirements of RNFL. Finally, a PFH analysis solver SKLY.app is developed based on the proposed model.

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          Most cited references 29

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            Near-field optics: microscopy, spectroscopy, and surface modification beyond the diffraction limit.

            The near-field optical interaction between a sharp probe and a sample of interest can be exploited to image, spectroscopically probe, or modify surfaces at a resolution (down to approximately 12 nm) inaccessible by traditional far-field techniques. Many of the attractive features of conventional optics are retained, including noninvasiveness, reliability, and low cost. In addition, most optical contrast mechanisms can be extended to the near-field regime, resulting in a technique of considerable versatility. This versatility is demonstrated by several examples, such as the imaging of nanometric-scale features in mammalian tissue sections and the creation of ultrasmall, magneto-optic domains having implications for highdensity data storage. Although the technique may find uses in many diverse fields, two of the most exciting possibilities are localized optical spectroscopy of semiconductors and the fluorescence imaging of living cells.
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              Moore's law: past, present and future

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                Author and article information

                Journal
                Tsinghua Science and Technology
                Friction
                Tsinghua University Press (Xueyuan Building, Tsinghua University, Beijing 100084, China )
                2223-7690
                05 December 2018
                : 06
                : 04
                : 443-456 (pp. )
                Affiliations
                State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China
                Author notes
                * Corresponding author: Yonggang MENG, E-mail: mengyg@ 123456tsinghua.edu.cn

                Yueqiang HU. He received his bachelor degree in mechanical engineering in 2013 from Southwest Jiaotong University, Chengdu, China. After then, he was a PhD student in the State Key Laboratory of Tribology at the Tsinghua University. His research interests include nanomanufacturing and nanophotonics.

                Yonggang MENG. He is a professor in mechanical engineering, and serves as the director of the State Key Laboratory of Tribology (SKLT), Tsinghua University, China. Before he joined the SKLT in 1990, he obtained  his  master  and  PhD degrees in mechanical engineering from Kumamoto University, Japan, in 1986 and 1989, respectively. He is the author or co-author of over 160 peer-reviewed papers and 4 book chapters. His research area covers engineering tribology, surface and interface sciences, and micro/nanomanufacturing.

                Article
                2223-7690-06-04-443
                10.1007/s40544-017-0189-z

                This work is licensed under a Creative Commons Attribution 4.0 Unported License. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

                Page count
                Figures: 10, Tables: 0, References: 36, Pages: 14
                Categories
                Research Article

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