Colloquium:Reactive plasmas as a versatile nanofabrication tool

Ostrikov, K

doi:10.1103/RevModPhys.77.489

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Colloquium:Reactive plasmas as a versatile nanofabrication tool

Author(s): K. Ostrikov

Publication date (Print): June 2005

Journal: Reviews of Modern Physics

Publisher: American Physical Society (APS)

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Journal ID (publisher-id): RMPHAT

Title: Reviews of Modern Physics

Abbreviated Title: Rev. Mod. Phys.

Publisher: American Physical Society (APS)

ISSN (Print): 0034-6861

ISSN (Electronic): 1539-0756

Publication date Created: June 2005

Publication date (Print): June 2005

Volume: 77

Issue: 2

Pages: 489-511

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DOI: 10.1103/RevModPhys.77.489

SO-VID: f33f04cf-3dc0-481c-aed4-e50dedf33872

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http://link.aps.org/licenses/aps-default-license

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Colloquium:Reactive plasmas as a versatile nanofabrication tool

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