15
views
0
recommends
+1 Recommend
0 collections
    0
    shares
      • Record: found
      • Abstract: not found
      • Article: not found

      Refractory silicides for integrated circuits

      Journal of Vacuum Science and Technology
      American Vacuum Society

      Read this article at

      ScienceOpenPublisher
      Bookmark
          There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.

          Related collections

          Author and article information

          Journal
          Journal of Vacuum Science and Technology
          Journal of Vacuum Science and Technology
          American Vacuum Society
          0022-5355
          July 1980
          July 1980
          : 17
          : 4
          : 775-792
          Article
          10.1116/1.570560
          f6dcbc2a-de99-4c01-923f-4f36451655b7
          © 1980
          History

          Comments

          Comment on this article