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      Measuring and predicting resolution in nanopositioning systems

      Mechatronics
      Elsevier BV

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          Journal
          Mechatronics
          Mechatronics
          Elsevier BV
          09574158
          September 2014
          September 2014
          : 24
          : 6
          : 605-618
          Article
          10.1016/j.mechatronics.2013.10.003
          f8d3f235-f78a-472d-b3be-61db6947673d
          © 2014

          https://www.elsevier.com/tdm/userlicense/1.0/

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