Review Article: Stress in thin films and coatings: Current status, challenges, and prospects

[1 ]Département de Physique et Mécanique des Matériaux, Institut Pprime, UPR 3346, CNRS-Université de Poitiers-ENSMA, SP2MI, Téléport 2, F86962 Futuroscope-Chasseneuil, France

[2 ]School of Engineering, Brown University, Providence, Rhode Island 02912-9104

[3 ]Department of Materials Physics, Montanuniversität Leoben and Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Leoben 8700, Austria

[4 ]Engineering Department, University of Rome “ROMA TRE,” Via della Vasca Navale 79, Rome 00147, Italy

[5 ]Department of Metallurgical and Materials Engineering, The University of Alabama, P.O. Box 870202, Tuscaloosa, Alabama 35487-0202

[6 ]Laboratoire Sciences et Ingénierie de la Matière Molle, ESPCI Paris, PSL University, Sorbonne Université, CNRS, F-75005 Paris, France

[7 ]Mechanical Engineering Department, The University of Akron, Akron, Ohio 44325-0406

[8 ]IBM T.J. Watson Research Center, Yorktown Heights, New York 10598

[9 ]Eastman Chemical Co., 3788 Fabian Way, Palo Alto, California 94303

[10 ]Department of Engineering Physics, Polytechnique Montréal, Montreal, Quebec H3T 1J4, Canada