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      Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric lamb wave mode

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          Rayleigh and Lamb Waves

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            Lateral-field-excited thin-film Lamb wave resonator

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              Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature

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                Author and article information

                Journal
                IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
                IEEE Trans. Ultrason., Ferroelect., Freq. Contr.
                Institute of Electrical and Electronics Engineers (IEEE)
                0885-3010
                January 2007
                January 2007
                : 54
                : 1
                : 87-95
                Article
                10.1109/TUFFC.2007.214
                fbfe90e7-6fbf-4059-bb64-76c8704fa23b
                © 2007
                History

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