High Rate Thick Film Growth

Thornton, J. A.

doi:10.1146/annurev.ms.07.080177.001323

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High Rate Thick Film Growth

Author(s): J A Thornton

Publication date Created: August 1977

Publication date (Print): August 1977

Journal: Annual Review of Materials Science

Publisher: Annual Reviews

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Title: Annual Review of Materials Science

Abbreviated Title: Annu. Rev. Mater. Sci.

Publisher: Annual Reviews

ISSN (Print): 0084-6600

Publication date Created: August 1977

Publication date (Print): August 1977

Volume: 7

Issue: 1

Pages: 239-260

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DOI: 10.1146/annurev.ms.07.080177.001323

SO-VID: fd5e0b61-fe3c-4d21-8971-4927fbe80dab

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High Rate Thick Film Growth

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