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Biplate artifacts in rotating-compensator ellipsometers
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Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth
Joungchel Lee, P. I. Rovira, Ilsin An … (1998)
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<title>Recent developments in spectroscopic ellipsometry for in-situ applications</title>
Blaine D. Johs, Jeff R. Hale, Natale Ianno … (2001)
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Alignment and calibration of the MgF_2 biplate compensator for applications in rotating-compensator multichannel ellipsometry
Joungchel Lee, P. Soler Rovira, Ilsin An … (2001)