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Study of low-temperature direct bonding of (111) and (100) silicon wafers under various ambient and surface conditions
Author(s):
Drago Resnik
,
Danilo Vrtačnik
,
Uroš Aljančič
,
Slavko Amon
Publication date
Created:
March 2000
Publication date
(Print):
March 2000
Journal:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
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Silicon thin film solar cells
Author and article information
Journal
Title:
Sensors and Actuators A: Physical
Abbreviated Title:
Sensors and Actuators A: Physical
Publisher:
Elsevier BV
ISSN (Print):
09244247
Publication date Created:
March 2000
Publication date (Print):
March 2000
Volume
: 80
Issue
: 1
Pages
: 68-76
Article
DOI:
10.1016/S0924-4247(99)00299-X
SO-VID:
2a434cc8-764b-4084-8c4f-1305e39dee57
Copyright ©
© 2000
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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