Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
ISSN
(Electronic):
1361-6439
Publication date Created:
May
01 2006
Publication date
(Print):
May
01 2006
Volume: 16
Issue: 5
Pages: R13-R39
Article
DOI: 10.1088/0960-1317/16/5/R01
SO-VID: b8d1d819-130a-4540-8088-e05716f115ef
Copyright © ©
2006