New Chemically Amplified Positive Photoresist with Phenolic Resin Modified by GMA and BOC Protection

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Abstract

In this paper, a chemically amplified (CA) i-line photoresist system is described including a phenolic resin modified with glycidyl methacrylate (GMA) addition and protected with di-tert-butyl dicarbonate (BOC group), here called JB resin. JB resin with different degrees of BOC protection was synthesized and characterized with ultraviolet spectrophotometry, Fourier transform infrared spectroscopy and gel permeation chromatography. These resins were also evaluated in CA resists by formulating the JB resin with a photoacid generator (PAG) and tested at 405 nm and 365 nm exposure wavelengths. The BOC protection ratio at approximately 25 mol% of the Novolak phenol group showed the best performance. The resist showed high sensitivity (approximately 190 mJ/cm2), high resolution and good alkali developer resistance with reliable repeatability, indicating the great practical potential of this JB resist system.

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Naturally occurring phenolic sources: monomers and polymers

Bimlesh Lochab, Swapnil Shukla, Indra Varma (2014)

Phenolic compounds sourced from agro-based feedstock, viz. cashew nut shell liquid, lignin, tannin, palm oil, and coconut shell tar, have come up as sustainable alternatives to petro-based feedstock. This review explores their utility as green polymer feedstock with citation of ~ 600 references. Exploration of sustainable alternatives to chemicals derived from petro-based industries is the current challenge for maintaining the balance between the needs of a changing world while preserving nature. The major source for sustainable chemicals is either the natural existing plant sources or waste generated from agro-based industries. The utility of such resources will supplement new processed materials with different sets of properties and environmental friendliness due to their biodegradability and low toxicity during preparation, usage and disposal. Amongst other polymers used on a day-to-day basis, phenolic resins account for vast usage. Replacement of petro-based monomers such as phenol and its derivatives either partly or completely utilized for the synthesis of such resins is ongoing. Extraction of natural phenolic components from cashew nut shell liquid, lignin, tannin, palm oil, coconut shell tar or from agricultural and industrial waste, and their utilization as synthons for the preparation of bio-based polymers and properties obtained are reviewed in this paper. This review article is designed to acknowledge efforts of researchers towards the “3C” motto – not only trying to create but also adapting the principles to conserve and care for a sustainable environment. This review paper describes how extraction, separation and recovery of desired phenolic compounds have occurred recently; how substituted phenol compounds, unmodified and modified, act as monomers for polymerization; and how the presence of sustainable phenolic material affects the properties of polymers. There are about 600 references cited and still there is a lot to uncover in this research area.