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Mechanical behavior of TiN/CrN nano-multilayer thin film deposited by unbalanced magnetron sputter process
Author(s):
Pei-Ling Sun
,
Cherng-Yuh Su
,
Tai-Pin Liou
,
Cheng-Hsun Hsu
,
Chung-Kwei Lin
Publication date:
2011
Journal:
Journal of Alloys and Compounds
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Silicon thin film solar cells
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DOI::
10.1016/j.jallcom.2010.12.057
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