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      Observation of ion bombardment damage in silicon

      , ,
      Philosophical Magazine
      Informa UK Limited

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          Most cited references7

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          Angular Distributions of (α,n) Reaction son Be and C

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            Conversion of crystalline germanium to amorphous germanium by ion bombardment

            J Parsons (1965)
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              An investigation of thermal spikes by studying the high energy sputtering of metals at elevated temperatures

              R Nelson (1965)
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                Author and article information

                Journal
                Philosophical Magazine
                Philosophical Magazine
                Informa UK Limited
                0031-8086
                June 1968
                June 1968
                : 17
                : 150
                : 1145-1161
                Article
                10.1080/14786436808223192
                0f877bd9-ba79-4a7e-9b19-a15da9e86198
                © 1968
                History

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