Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Abbreviated Title:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Publisher:
American Vacuum Society
ISSN
(Print):
0734-2101
ISSN
(Electronic):
1520-8559
Publication date Created:
November
1986
Publication date
(Print):
November
1986
Volume: 4
Issue: 6
Pages: 3007-3014
Article
DOI: 10.1116/1.573616
SO-VID: 16fdb55a-609f-472c-b7eb-ca0884ad518e
Copyright © ©
1986