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Production of large‐area single‐crystal wafers of cubic SiC for semiconductor devices
March 1983
March 1983
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Most cited references8
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Electron channeling patterns in the scanning electron microscope
David C. Joy, Dale E Newbury, David L. Davidson (1982)
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Chemical Vapor Deposition of Single Crystalline β-SiC Films on Silicon Substrate with Sputtered SiC Intermediate Layer
Shigehiro Nishino (1980)
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IVA-8 heteroepitaxial growth of cubic silicon carbide on foreign substrates
H Matsunami, S Nishino, H. Ono (1981)