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      Titanium nitride oxidation chemistry: An x‐ray photoelectron spectroscopy study

      Author(s): ,
      Publication date Created:
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids

          M. Seah, W. Dench (1979)
          Article 0 comments Cited 792 times – based on 0 reviews     Review now
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            Vacancy effects in the x-ray photoelectron spectra ofTiNx

            Laurent Roux, Louis Porte, Jean Hanus (1983)
            Article 0 comments Cited 49 times – based on 0 reviews     Review now
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              The use of titanium-based contact barrier layers in silicon technology

              M. Wittmer, C.Y. Ting (1982)
              Article 0 comments Cited 43 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: October 1992
                Publication date (Print): October 1992
                Volume: 72
                Issue: 7
                Pages: 3072-3079
                Article
                DOI: 10.1063/1.351465
                SO-VID: 25cc80be-0e00-4b3c-a597-a5a34e69370c
                Copyright © © 1992
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