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Highly porous silicon membrane fabrication using polymer self-assembly
Author(s):
C. R. Black
,
K. W. Guarini
,
G BREYTA
,
M. C. Colburn
,
R. RUIZ
,
R. Sandstrom
,
E. E. Sikorski
,
Y ZHANG
,
G. Breyta
,
Y zhang
,
R. Ruiz
,
Y. Zhang
,
C Black
,
J. L. M. R. Ruiz
,
R. Sandstrom
,
R Ruiz-Peinado
,
L Sandström
Publication date:
2006
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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Digitizing Fabrication
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DOI::
10.1116/1.2366700
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