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Novel abrasive-free planarization of 4H-SiC (0001) using catalyst
Hideyuki Hara ,
Yasuhisa Sano ,
Hidekazu Mimura ,
Kenta Arima ,
Akihisa Kubota ,
Keita Yagi ,
Junji Murata ,
Kazuto Yamauch
August 2006
August 2006
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