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Nanoimprint- and UV-lithography: Mix&Match process for fabrication of interdigitated nanobiosensors
Author(s):
L. Montelius
,
B. Heidari
,
M. Graczyk
,
I. Maximov
,
E-L. Sarwe
,
T.G.I. Ling
Publication date
Created:
June 2000
Publication date
(Print):
June 2000
Journal:
Microelectronic Engineering
Publisher:
Elsevier BV
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There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
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Digitizing Fabrication
Author and article information
Journal
Title:
Microelectronic Engineering
Abbreviated Title:
Microelectronic Engineering
Publisher:
Elsevier BV
ISSN (Print):
01679317
Publication date Created:
June 2000
Publication date (Print):
June 2000
Volume
: 53
Issue
: 1-4
Pages
: 521-524
Article
DOI:
10.1016/S0167-9317(00)00369-5
SO-VID:
57e7c89a-c114-4c0a-bd5d-29a88efd8150
Copyright ©
© 2000
License:
http://www.elsevier.com/tdm/userlicense/1.0/
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