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      Stress generated in polyimide by excimer‐laser irradiation

      Author(s): , ,
      Publication date Created:
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      Journal: Journal of Applied Physics
      Publisher: AIP Publishing

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          Physical study of laser-produced plasma in confined geometry

          D. Devaux, P Ballard, J. Fournier … (1990)
          Article 0 comments Cited 110 times – based on 0 reviews     Review now
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            Excimer laser etching of polyimide

            J. Lankard, A. I. Baise, F. Burns … (1985)
            Article 0 comments Cited 98 times – based on 0 reviews     Review now
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              Direct etching of polymeric materials using a XeCl laser

              P. Dyer, D. Forster, P. Key … (1983)
              Article 0 comments Cited 78 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Journal of Applied Physics
                Abbreviated Title: Journal of Applied Physics
                Publisher: AIP Publishing
                ISSN (Print): 0021-8979
                ISSN (Electronic): 1089-7550
                Publication date Created: September 15 1993
                Publication date (Print): September 15 1993
                Volume: 74
                Issue: 6
                Pages: 4181-4189
                Article
                DOI: 10.1063/1.354422
                SO-VID: 5aafeb03-fe61-4270-af39-b8017e09146e
                Copyright © © 1993
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