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Growth of high quality Ge epitaxial layer on Si(100) substrate using ultra thin Si0.5Ge0.5 buffer
Author(s):
Junko Nakatsuru
,
Hiroki Date
,
Supika Mashiro
,
Manabu Ikemoto
Publication date:
2005
Journal:
MRS Proceedings
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DOI::
10.1557/PROC-0891-EE07-24
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