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Forming sub-45-nm high-aspect circle-symmetric spots with double bowtie aperture combined with metal-insulator-metal structure
Author(s):
Jie Zheng
,
Weidong Chen
,
Xianchao Liu
,
Yuerong Huang
,
Yunyue Liu
,
Ling Li
,
Zhengwei Xie
Publication date
Created:
July 2018
Publication date
(Print):
July 2018
Journal:
Applied Surface Science
Publisher:
Elsevier BV
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There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
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Author and article information
Journal
Title:
Applied Surface Science
Abbreviated Title:
Applied Surface Science
Publisher:
Elsevier BV
ISSN (Print):
01694332
Publication date Created:
July 2018
Publication date (Print):
July 2018
Volume
: 447
Pages
: 300-306
Article
DOI:
10.1016/j.apsusc.2018.03.224
SO-VID:
7df9d3f2-88eb-4ab5-8f3d-d94f58545ec0
Copyright ©
© 2018
License:
https://www.elsevier.com/tdm/userlicense/1.0/
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