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      Forming sub-45-nm high-aspect circle-symmetric spots with double bowtie aperture combined with metal-insulator-metal structure

      , , , , , ,
      Applied Surface Science
      Elsevier BV

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          Author and article information

          Journal
          Applied Surface Science
          Applied Surface Science
          Elsevier BV
          01694332
          July 2018
          July 2018
          : 447
          : 300-306
          Article
          10.1016/j.apsusc.2018.03.224
          7df9d3f2-88eb-4ab5-8f3d-d94f58545ec0
          © 2018

          https://www.elsevier.com/tdm/userlicense/1.0/


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