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      An Integrated ISFET Sensor Array

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          Abstract

          A monolithically integrated ISFET sensor array and interface circuit are described. A new high-density, low-power source-drain follower was developed for the sensor array. ISFETs were formed by depositing Au/Ti extended-gate electrodes on standard MOSFETs, then thin silicon nitride layers using catalytic chemical vapor deposition and/or SU-8 protective layers were formed on the extended-gate electrodes. Applications for the array include: (1) pH detection by statistical distribution observing time and space fluctuations; (2) DNA detection using thiol-modified or silane-coupled oligonucleotides; (3) bio-image sensing by converting photons to electrons using Photosystem I of Thermosynechococcus elongatus, and sensing the converted electric charges by ISFETs.

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          Thirty years of ISFETOLOGY

          P Bergveld (2003)
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            A general model to describe the electrostatic potential at electrolyte oxide interfaces

            J.C.T. Eijkel, R.E.G. van Hal, P Bergveld (1996)
            Article 0 comments Cited 51 times – based on 0 reviews     Review now
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              Labelfree fully electronic nucleic acid detection system based on a field-effect transistor device.

              A Offenhäusser, F Uslu, S Meffert … (2004)
              The labelfree detection of nucleic acid sequences is one of the modern attempts to develop quick, cheap and miniaturised hand-held devices for the future genetic testing in biotechnology and medical diagnostics. We present an approach to detect the hybridisation of DNA sequences using electrolyte-oxide-semiconductor field-effect transistors (EOSFETs) with micrometer dimensions. These semiconductor devices are sensitive to electrical charge variations that occur at the surface/electrolyte interface, i.e. upon hybridisation of oligonucleotides with complementary single-stranded (ss) oligonucleotides, which are immobilised on the oxide surface of the transistor gate. This method allows direct, time-resolved and in situ detection of specific nucleic acid binding events without any labelling. We focus on the detection mechanism of our sensors by using oppositely charged polyelectrolytes (PAH and PSS) subsequently attached to the transistor structures. Our results indicate that the sensor output is charge sensitive and distance dependent from the gate surface, which pinpoints the need for very defined surface chemistry at the device surface. The hybridisation of natural 19 base-pair sequences has been successfully detected with the sensors. In combination with nano-transistors a PCR free detection system might be feasible in future.
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                Author and article information

                Journal
                Journal ID (nlm-ta): Sensors (Basel)
                Title: Sensors (Basel, Switzerland)
                Publisher: Molecular Diversity Preservation International (MDPI)
                ISSN (Electronic): 1424-8220
                Publication date (Electronic): 4 November 2009
                Publication date Collection: 2009
                Volume: 9
                Issue: 11
                Pages: 8831-8851
                Affiliations
                Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi 464-8603, Japan; E-Mail: nakazato@ 123456nuee.nagoya-u.ac.jp ; Tel.: +81-52-789-3307; Fax: +81-52-789-3139
                Article
                Publisher ID: sensors-09-08831
                DOI: 10.3390/s91108831
                PMC ID: 3260616
                PubMed ID: 22291539
                SO-VID: 7e2743c5-2ed5-4124-871d-44b26c007d19
                Copyright © © 2009 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.
                License:

                This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license ( http://creativecommons.org/licenses/by/3.0/).

                History
                Date received : 5 August 2009
                Date revision received : 30 September 2009
                Date accepted : 16 October 2009
                Categories
                Subject: Review

                ScienceOpen disciplines: Biomedical engineering
                Keywords: isfet,cmos biotechnology,source-drain follower,biosensor array
                Data availability:
                ScienceOpen disciplines: Biomedical engineering
                Keywords: isfet, cmos biotechnology, source-drain follower, biosensor array

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