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      A Review of MEMS Capacitive Microphones

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          Abstract

          This review collates around 100 papers that developed micro-electro-mechanical system (MEMS) capacitive microphones. As far as we know, this is the first comprehensive archive from academia on this versatile device from 1989 to 2019. These works are tabulated in term of intended application, fabrication method, material, dimension, and performances. This is followed by discussions on diaphragm, backplate and chamber, and performance parameters. This review is beneficial for those who are interested with the evolutions of this acoustic sensor.

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          A review of silicon microphones

          A.G.H. van der Donk, P Bergveld, W Olthuis … (1994)
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            Mechanically coupled ears for directional hearing in the parasitoid fly Ormia ochracea.

            C Miles, Lee D. Robert, Luke Hoy (1995)
            An analysis is presented of the mechanical response to a sound field of the ears of the parasitoid fly Ormia ochracea. This animal shows a remarkable ability to detect the direction of an incident sound stimulus even though its acoustic sensory organs are in very close proximity to each other. This close proximity causes the arrival times of the sound pressures at the two ears to be less than 1 to 2 microseconds depending on the direction of propagation of the sound wave. The small differences in these two pressures must be processed by the animal in order to determine the incident direction of the sound. In this fly, the ears are so close together that they are actually joined by a cuticular structure which couples their motion mechanically and subsequently magnifies interaural differences. The use of a cuticular structure as a means to couple the ears to achieve directional sensitivity is novel and has not been reported in previous studies of directional hearing. An analytical model of the mechanical response of the ear to a sound stimulus is proposed which supports the claim that mechanical interaural coupling is the key to this animal's ability to localize sound sources. Predicted results for sound fields having a range of incident directions are presented and are found to agree very well with measurements.
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              A subminiature condenser microphone with silicon nitride membrane and silicon back plate

              Dietmar Hohm, Gisela Hess (1989)
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                Author and article information

                Journal
                Journal ID (nlm-ta): Micromachines (Basel)
                Journal ID (iso-abbrev): Micromachines (Basel)
                Journal ID (publisher-id): micromachines
                Title: Micromachines
                Publisher: MDPI
                ISSN (Electronic): 2072-666X
                Publication date (Electronic): 08 May 2020
                Publication date Collection: May 2020
                Volume: 11
                Issue: 5
                Electronic Location Identifier: 484
                Affiliations
                [1 ]Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi, Selangor 43600, Malaysia; aisyahzawawi@ 123456gmail.com (S.A.Z.); azlanhamzah@ 123456ukm.edu.my (A.A.H.); burhan@ 123456ukm.edu.my (B.Y.M.)
                [2 ]UiTM Foundation Centre, Universiti Teknologi Mara, Dengkil Campus, Dengkil, Selangor 43800, Malaysia
                [3 ]Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane QLD 4111, Australia
                Author notes
                Author information
                https://orcid.org/0000-0002-4707-7182
                https://orcid.org/0000-0001-8916-4420
                https://orcid.org/0000-0002-6030-7480
                Article
                Publisher ID: micromachines-11-00484
                DOI: 10.3390/mi11050484
                PMC ID: 7281444
                PubMed ID: 32397340
                SO-VID: 7ec1adb7-a18a-49dc-9457-e5590387ca53
                Copyright © © 2020 by the authors.
                License:

                Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license ( http://creativecommons.org/licenses/by/4.0/).

                History
                Date received : 28 February 2020
                Date accepted : 30 April 2020
                Categories
                Subject: Review

                Keywords: micro-electro-mechanical system (mems),capacitive microphone,condenser microphone,acoustic sensor,evolution
                Data availability:
                Keywords: micro-electro-mechanical system (mems), capacitive microphone, condenser microphone, acoustic sensor, evolution

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