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A 16nm FinFET CMOS technology for mobile SoC and computing applications
Author(s):
S.Y. Wu
,
C.Y. LIN
,
M.C. Chiang
,
J.J. Liaw
,
J.Y. Cheng
,
S.H. Yang
,
M. LIANG
,
T MIYASHITA
,
C.H. Tsai
,
B.-C. Hsu
,
S.-Y. Wu
,
T Miyashita
,
C.H. Tsai
,
H.Y. Chen
Publication date:
Journal:
Proceedings of the 2013 IEEE International Electron Devices Meeting
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